主要特点 Main feature Under the vacuum condition , a RF power supply acts on the rare gas in the vacuum chamber to form the plasma equivalent glow effect ( PECVD patent of our company ) , and the field energy of the plasma replaces the..
主要特点Main features 前端配有预热炉,可用于蒸发固态源 Equipped with a preheating furnace for evaporating solid state sources 加热炉选用滑轨炉,可实现快速升温/降温,缩短实验时间 Uses a slide furn..